Defects in HIgh-k Gate Dielectric Stacks (English, Evgeni Gusev)
by Evgeni Gusev
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Book Details
Publisher
Springer
Language
English
ISBN-13
9781402043659
ISBN-10
1402043651
Author
Evgeni Gusev
About the Book
The goal of this NATO Advanced Research Workshop (ARW) entitled "Defects in Advanced High-k Dielectric Nano-electronic Semiconductor Devices", which was held in St. Petersburg, Russia, from July 11 to 14, 2005, was to examine the very complex scientific issues that pertain to the use of advanced high dielectric constant (high-k) materials in next generation semiconductor devices. The special feature of this workshop was focus on an important issu…
ISBN: 9781402043659
ISBN-13: 9781402043659
ISBN-10: 1402043651
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Product ID: isbn-9781402043659
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